High Sensitivity Electrothermal Actuation-based CMOS-MEMS Relative Humidity Sensor
Keywords:
CMOS-MEMS, Humidity sensing, Electrothermal, Titanium dioxide,Abstract
This paper presents a high sensitivity CMOSMEMS humidity sensor based on electrothermal actuation for application in indoor relative humidity monitoring. The detection is based on the principle of amplitude change as a result of absorption/adsorption or desorption of the humidity molecules onto the surface of a titanium dioxide (TiO2) active material deposited on a moving plate of the sensor resulting into a change of its mass. The CMOS-MEMS humidity sensor measurement is performed after preconditioning in which the sensor goes through early actuation before the real measurement is done. The sensor is operated in the dynamic mode at an actuation input frequency of 2 Hz and a driving voltage varied from 2 Vpp to 6 Vpp. The maximum output voltage observed was at 4 Hz, which is double the input frequency. The voltage was found to increase linearly from 8.728 mV to 71.117 mV with the increase in driving voltage from 2 Vpp to 6 Vpp. The response of the device to humidity shows linear output voltage change from 66.998 mV to 69.822 mV when relative humidity increases from 40% RH to 60% RH with a sensitivity of 0.14 mV/% RH.References
H. Farahani, R. Wagiran, and M. Hamidon, "Humidity Sensors Principle, Mechanism, and Fabrication Technologies: A Comprehensive Review," Sensors, vol. 14, p. 7881, 2014.
K. S. Choi, D. S. Kim, H. J. Yang, M. S. Ryu, J. S. Chae, and S. P. Chang, "Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths," Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 14, 2015.
R. Fenner and E. Zdankiewicz, "Micromachined water vapor sensors: a review of sensing technologies," Sensors Journal, IEEE, vol. 1, pp. 309-317, 2001.
J. Fritz, M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H. -J. Güntherodt, C. Gerber, and J. K. Gimzewski, "Translating Biomolecular Recognition into Nanomechanics," Science, vol. 288, pp. 316-318, 2000.
A. Hierlemann, and H. Baltesa “CMOS-based chemical microsensors," Analyst, vol. 128, pp. 15-28, 2003.
B. Mukherjee, K. B. M. Swamy, and S. Sen, "A new approach for sensitivity improvement of MEMS capacitive accelerometer using electrostatic actuation," in Sixth International Conference on Sensing Technology (ICST), 2012, pp. 738-742.
I. Voiculescu, M. E. Zaghloul, Fellow, IEEE, R. A. McGill, E. J. Houser, and G. K. Fedder, "Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons," Sensors Journal, IEEE, vol. 5, pp. 641-647, 2005.
S. S. Bedair, and G. K. Fedder, "CMOS MEMS Oscillator for Gas Chemical Detection," in Sensors. Proceedings of IEEE, 2004, pp. 955- 958.
R. Nuryadi, A. Djajadi, R. Adiel, L. Aprilia and N. Aisah, "Resonance Frequency Change in Microcantilever-Based Sensor due to Humidity Variation," Materials Science Forum, vol. 737, pp. 176-182, 2013.
L. Khine, J. M. Tsai, A. Heidari, and Y. Yong-Jin, "Piezoelectric MEMS resonant gas sensor for defence applications," in Defense Science Research Conference and Expo (DSR), 2011, pp. 1-3.
G. Uma, M. Umapathy, L. B. Vidhya, M. Maya, T. Sophia, and K. Tamilarasi, "Design and analysis of resonant based gas sensor," in Sensors Applications Symposium SAS 2008 IEEE, pp. 119-121.
V. A. Thakar, Z. Wu, A. Peczalski, and M. Rais-Zadeh, "Piezoelectrically Transduced Temperature-Compensated FlexuralMode Silicon Resonators," Journal of Microelectromechanical Systems, vol. 22, pp. 815-823, 2013.
V. Beroulle, Y. Bertrand, L. Latorre, and P. Nouet, "Monolithic piezoresistive CMOS magnetic field sensors," Sensors and Actuators A: Physical, vol. 103, pp. 23-32, 2003.
A. L. H. May, P. J. G. Ramírez, L. A. A. Cortés, E. Figueras, J. M. Castillo, E. Manjarrez, A. Sauceda, L. G. González, and R. J. Aguirre, "Mechanical design and characterization of a resonant magnetic field microsensor with linear response and high resolution," Sensors and Actuators A: Physical, vol. 165, pp. 399-409, 2011.
A. Hajjam and S. Pourkamali, "Fabrication and Characterization of MEMS-Based Resonant Organic Gas Sensors," Sensors Journal, IEEE, vol. 12, pp. 1958-1964, 2012.
A. Hajjam, A. Logan, and S. Pourkamali, "Fabrication and characterization of MEMS-based resonant organic gas sniffers," in Sensors, IEEE, 2011, pp. 1105-1108.
A. Rahafrooz and S. Pourkamali, "Fully micromechanical piezothermal oscillators," in 2010 IEEE International Electron Devices Meeting (IEDM), 2010, pp. 7.2.1-7.2.4.
A. Hajjam, J. Pandiyan, A. Rahafrooz, and S. Pourkamali, "MEMS resonant sensors for detection of gasoline vapor," in Sensors, IEEE, 2010, pp. 1538-1541.
J. C. W. Arash Hajjam1, Amir Rahafrooz1 and Siavash Pourkamali1, "Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization," Journal of Micromechanics and Microengineering, vol. 20, 2010.
A. Rahafrooz and S. Pourkamali, "High-Frequency Thermally Actuated Electromechanical Resonators with Piezoresistive Readout," IEEE Transactions on Electron Devices, vol. 58, pp. 1205-1214, 2011.
A. Rahafrooz, A. Hajjam, B. Tousifar, and S. Pourkamali, "Thermal actuation, a suitable mechanism for high frequency electromechanical resonators," in IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010, pp. 200-203.
A. Hajjam, A. Logan, J. Pandiyan, and S. Pourkamali, "High frequency thermal-piezoresistive MEMS resonators for detection of organic gases," in Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS),, 2011, pp. 1-5.
B. Bahreyni, Fabrication & Design of Resonant Microdevices: Elsevier Science, 2008.
V. Kumar and N. Sharma, "Design and Validation of Silicon-onInsulator Based U Shaped Thermal Microactuator," International Journal of Materials, Mechanics and Manufacturing, vol. 2, pp. 86-91, 2014.
N. Islam, Microelectromechanical Systems and Devices. Janeza Trdine 9, 51000 Rijeka, Croatia InTech, 2012.
A. Kalaiarasi and S. HosiminThilagar, "Design and Finite Element Analysis of Electrothermal Compliant Microactuators," in Proceedings of Bangalore Conference, 2011.
H. Sehr, I. Tomlin, B. Huang, S. Beeby, A. Evans, A. Brunnschweiler, G. Ensell, C. Schabmueller, and T. Niblock, "Time constant and lateral resonances of thermal vertical bimorph actuators," Journal of Micromechanics and Microengineering, vol. 12, p. 410, 2002.
E. T. Enikov, S. S. Kedar, and K. V. Lazarov, "Analytical model for analysis and design of V-shaped thermal microactuators," Journal of Microelectromechanical Systems, vol. 14, pp. 788-798, 2005.
T. S. J. Lammerink, M. Elwenspoek, R. H. Van Ouwerkerk, S. Bouwstra, and J. H. J. Fluitman, "Performance of thermally excited resonators," Sensors and Actuators A: Physical, vol. 21, pp. 352-356, 1990.
T. S. J. Lammerink, M. Elwenspoek, and J. H. J. Fluitman, "Frequency dependence of thermal excitation of micromechanical resonators," Sensors and Actuators A: Physical, vol. 27, pp. 685-689, 1991.
O. Brand, H. Baltes, and U. Baldenweg, "Thermally excited silicon oxide beam and bridge resonators in CMOS technology," IEEE Transactions on Electron Devices, vol. 40, pp. 1745-1753, 1993.
J. O. Dennis, A. Y. Ahmed, M.H.M Khir and A. A. S. Rabih, "Modelling and Simulation of the Effect of Air Damping on the Frequency and Quality factor of a CMOS-MEMS Resonator" Applied Mathematics and Information Sciences. (AMIS) 2015, 9, 729–737.
A. Y. Ahmed, J. O. Dennis, M. H. Md Khir, M. N. Mohamad Saad and M. R. Buyong, "Design, Simulation and Fabrication of a Mass Sensitive CMOS-MEMS Resonator," Sensors & Transducers Journal, vol. 17, pp. 40-49, 2012.
A. Y. Ahmed, J. O. Dennis, M. H. Md Khir and M. N. Mohamad Saad, "Deposition of titanium dioxide nanoparticles on the membrane of a CMOS-MEMS resonator", AIP Conference Proceedings, 3rd International Conference on Fundamental and Applied Sciences (ICFAS 2014), V 1621, N 1, pp 522-529.
J. O. Dennis, A. Y. Ahmed and M. H. Md Khir, "Fabrication and Characterization of a CMOS-MEMS Humidity Sensor", Sensors 2015, vol. 15, pp. 16674-16687.
A. Y. Ahmed, J. O. Dennis, M. H. M. Khir and M. N. M. Saad, "Design and Characterization of Embedded Microheater on CMOS-MEMS Resonator for Application in Mass-Sensitive Gas Sensors". In Proceedings of the 2014 5th International Conference on Intelligent and Advanced Systems: Technological Convergence for Sustainable Future (ICIAS), Kuala Lumpur, Malaysia, 3–5 June 2014; pp. 1–4.
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