Design and Simulation of a Multi-Sensor System Growing a Plurality of Heater Chips on the Same Dielectric Membrane
Keywords:Gas Sensors, Heater, Platinum, Electro-Thermal Analysis, Multi-Sensor.
AbstractIn micro-sensors, the Micro Hotplate (MHP) is a crucial component, in particularly gas sensors. To control the temperature of the sensing layer, micro-heater is used in metal oxide gas (MOX) sensors as a hotplate. The temperature should be in the requisite temperature range over the heater area. This allows detection of the resistive changes as a function of varying concentration of different gases. Thus, their design is a very important aspect. In this paper, we presented the design and simulation results of a platinum combinative meander-spiral micro heater for a WO3 gas sensor. The objective of this paper is also to model a multi-sensor while growing a plurality of heater chips on the same membrane to improve gas sensors selectivity performance. Four different heating voltages were applied in order to attain four maximum temperatures required to detect O3, H2S, CO and NO2, by a WO3 multi- sensor.
Wang, C., Yin, L., Zhang, L., Xiang D. and Gao. R., “Metal Oxide Gas Sensors: Sensitivity and Influencing Factors”, Sensors, Vol: 10, No: 3, pp. 2088-2106, 2010.
Prajesha, R., Jaina, N., Khannaa, V. K., Guptac, V., Agarwala, A., “MEMS based Integrated Gas Sensor for NO2 and NH3”, INSTITUTE OF SMART STRUCTURES AND SYSTEMS (ISSS), Vol: 3, No: 3, pp. 1-6, 2014.
Lee, D. S., Han, S. D., Huh J. S., and Lee. D. D., “Nitrogen Oxides-Sensing Characteristics of WO3-Based Nanocrystalline Thick Film Gas Sensor” Sensoros and Actuators B Chemical, Vol: 60, No: 1, pp. 57-63, 1999.
Aguir, K., Lemire C., and Lollman, D. B. B., “Electrical properties of reactively sputtered WO3 thin films as ozone gas sensor”. Sensors and Actuators B Chemical, Vol: 84, No: 1, pp. 1-5, 2002.
Leng, J. Y., Xu, X. J., Ning, L. Y., Fan H. T., and Zhang, T., “Synthesis and gas-sensing characteristics of WO3 nanofibers via electrospinning”, Journal of Colloid and Interface Science, Vol: 356, No: 1, pp. 54-61, 2011.
Bendahan, M., Boulmani, R., Seguin J. L., and Aguir, K., “Characterization of ozone sensors based on WO3 reactively sputtered films: Influence of O2 concentration in the sputtering gas, and working temperature”, Sensors and Actuators B Chemical, Vol: 100, No: 3, pp. 320-324, 2004.
Lin, H.M., Hsu, C.M., Yang, H.Y., Lee P.Y., and Yang, C.C., “Nanocrystalline WO3-Based H2S Sensors”, Sensors and Actuators B Chemical, Vol: 22, No: 1, pp. 63-68, 1994.
Hübner, M., Simion, C.E., Haensch, A., Barsan, N., and Weimar, U., “CO sensing mechanism with WO 3 based gas sensors”, Sensors and Actuators B Chemical, Vol: 151, No: 1, pp. 103-106, 2010.
Zeng, J., Hu, M., Wang, W., Chen, H., and Qin, Y., “NO2-Sensing properties of porous WO3 gas Sensor based on anodized sputtered tungsten thin film”, Sensors and Actuators B Chemical, Vol: 161, No: 1, pp. 447-452, 2012.
Amrita, V. S., “Fabrication of a Micro-hotplate for Application as an Infrared Emitter”, Ph. D. disertation University Ottawa, Ontario; 2015.
Kathirvelan, J., and Vijayaraghavan, R., “Design, Simulation and Analysis of platinum micro heaters on Al2O3 substrate for sensor applications”, Journal of Engineering and Applied Sciences, Vol: 9, No: 11, pp. 2307-2314, 2014.
Frietsch, M., Zudock, F., Goschnick, J., and Bruns, M., “CuO catalytic membrane as selectivity trimmer for metal oxide gas sensors”, Sensorors and Actuators B-Chemical, Vol: 65, No: 1, pp. 379-381, 2000.
Zampollia, S., Elmia, I., Sturmann, J., Nicolettia, S., Doria, L., and Cardinalia, G.C., “Selectivity enhancement of metal oxide gas sensors using a micromachined gas chromatographic column” Sensors and Actuators B-Chemical, Vol: 105, No: 2, pp. 400-406, 2005.
Kumar, H.,. Sing, K.K, Sood, N. , Kumar, A., and Mittal, R.K., “Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system” Sensors Applications Symposium (SAS), 2014
Girija, K.G., Kaur, D., Belwanshi, V., Mehta, J.,. Vatsa, R.K, and Topkar, A., “Design and Electro-thermal analysis of micro hotplates for chemical sensors using standard multi user mems process” Proceedings of the 2nd International Symposium on Physics and Technology of Sensors. Pune. India, 27-29, 2015.
Kumar, N., and Mehta, N., “Analysing Different Geometries of Micro Hotplates”, International Journal of Engineering Research and Technology, Vol: 4, No: 7, pp. 502-510, 2015.
Saxena, G., and Paily, R., “Performance improvement of square microhotplate with insulation layer and heater geometry”, Microsystem Technologies. Vol: 21, No: 11, pp. 2331-2338, 2015.
Bansal, V., Gurjar, A., Kumar, D. and Prasad, B., “3-D Design, Electro-Thermal Simulation and Geometrical Optimization of spiral Platinum Micro-heaters for Low Power Gas sensing applications using COMSOLTM”, Excerpt from the Proceedings of the COMSOL Conference , Bangalore, 2011.
Khana, V.K., Parasad, M., Dwivedi, V.K., Shekhar, C., Pankaj, A.C. and Basu, J., “Design and electro-thermal simulation of a polysilicon microheater on a suspended membrane for use in gas sensing”, Indian Journal of Pure and Applied Physics, Vol:45, pp. 332-335, 2007.
Sinha, S., Roy, S., and Sarkar, C. K., “Design & Electro-Thermal Analysis of Microheater for Low Temperature MEMS based Gas Sensor” International Symposium on Devices MEMS, Intelligent Systems & Communication (ISDMISC) Proceedings published by International Journal of Computer Applications® (IJCA), pp.26-31, 2011.
Samerjai, T., Liewhiran, N., Wisitsoraat, C., and Phanichphant, A., “CO Detection of Hydrothermally Synthesized Pt-Loaded WO3 Films”, Journal of Nanoscience and Nantechnology, Vol: 14, No: 10, pp. 7763-7767, 2014.
Nisha, R., Madhusoodanan, K. N., and Prasad, V. S., “Nanocrystalline tungsten oxide thick film sensor for the detection of H2S gas”, International Journal of Environmental Science and Toxicology Research, Vol: 2, No: 3, pp. 55-63, 2014.
George, F., Leon, M., Afonja, A., and Binions, R., “Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring”, Sensors, Vol: 10, No: 6, pp. 5469-65502, 2010.
Bendahan, M., Boulmani, R., Seguin, J.L., and Aguir, K., “Characterization of ozone sensors based on WO3 reactively sputtered films: influence of O2 concentration in the sputtering gas, and working temperature”, Sensors and Actuators B-Chemical, Vol: 100, No: 3, pp. 320-324, 2004.
How to Cite
TRANSFER OF COPYRIGHT AGREEMENT
The manuscript is herewith submitted for publication in the Journal of Telecommunication, Electronic and Computer Engineering (JTEC). It has not been published before, and it is not under consideration for publication in any other journals. It contains no material that is scandalous, obscene, libelous or otherwise contrary to law. When the manuscript is accepted for publication, I, as the author, hereby agree to transfer to JTEC, all rights including those pertaining to electronic forms and transmissions, under existing copyright laws, except for the following, which the author(s) specifically retain(s):
- All proprietary right other than copyright, such as patent rights
- The right to make further copies of all or part of the published article for my use in classroom teaching
- The right to reuse all or part of this manuscript in a compilation of my own works or in a textbook of which I am the author; and
- The right to make copies of the published work for internal distribution within the institution that employs me
I agree that copies made under these circumstances will continue to carry the copyright notice that appears in the original published work. I agree to inform my co-authors, if any, of the above terms. I certify that I have obtained written permission for the use of text, tables, and/or illustrations from any copyrighted source(s), and I agree to supply such written permission(s) to JTEC upon request.