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High Sensitivity Electrothermal Actuation-based CMOS-MEMS Relative Humidity Sensor

A. Y. Ahmed, G. Witjaksono, J. O. Dennis, M. H. Md Khir, Almur. A. S. Rabih, Muhammad. U. Mian, Mawahib. G. A. Ahmed

83-87

2017-11-30

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