Beng Joo T, Ibrahim K, Abd Manap N, Salehuddin F. Challenges for 0.13µm Generation Shallow Trench Isolation on 0.18µm Equipment Platform. JTEC [Internet]. 2016Aug.1 [cited 2024Apr.20];8(5):15-21. Available from: https://jtec.utem.edu.my/jtec/article/view/697