Mah S, Ahmad I, Ker PJ, Z. A. NF. High-k Dielectric Thickness and Halo Implant on Threshold Voltage Control. JTEC [Internet]. 2018Jul.4 [cited 2024May1];10(2-6):1-5. Available from: https://jtec.utem.edu.my/jtec/article/view/4361