Beng Joo, T., Ibrahim, K., Abd Manap, N. and Salehuddin, F. (2016) “Challenges for 0.13µm Generation Shallow Trench Isolation on 0.18µm Equipment Platform”, Journal of Telecommunication, Electronic and Computer Engineering (JTEC), 8(5), pp. 15–21. Available at: https://jtec.utem.edu.my/jtec/article/view/697 (Accessed: 26April2024).