AHMED, A. Y.; WITJAKSONO, G.; DENNIS, J. O.; MD KHIR, M. H.; RABIH, A. A. S.; MIAN, M. U.; AHMED, M. G. A. High Sensitivity Electrothermal Actuation-based CMOS-MEMS Relative Humidity Sensor. Journal of Telecommunication, Electronic and Computer Engineering (JTEC), [S. l.], v. 9, n. 3-8, p. 83–87, 2017. Disponível em: https://jtec.utem.edu.my/jtec/article/view/3103. Acesso em: 21 feb. 2024.