KAHARUDIN, K. E.; SALEHUDDIN, F.; MOHD ZAIN, A. S.; ABD AZIZ, M. N. I. Impact of Different Dose, Energy and Tilt Angle in Source/Drain Implantation for Vertical Double Gate PMOS Device. Journal of Telecommunication, Electronic and Computer Engineering (JTEC), [S. l.], v. 8, n. 5, p. 23–28, 2016. Disponível em: https://jtec.utem.edu.my/jtec/article/view/719. Acesso em: 27 jul. 2024.