BENG JOO, T.; IBRAHIM, K.; ABD MANAP, N.; SALEHUDDIN, F. Challenges for 0.13µm Generation Shallow Trench Isolation on 0.18µm Equipment Platform. Journal of Telecommunication, Electronic and Computer Engineering (JTEC), [S. l.], v. 8, n. 5, p. 15–21, 2016. Disponível em: https://jtec.utem.edu.my/jtec/article/view/697. Acesso em: 26 dec. 2024.