Kaharudin, K. E., Salehuddin, F., Mohd Zain, A. S., & Abd Aziz, M. N. I. (2016). Impact of Different Dose, Energy and Tilt Angle in Source/Drain Implantation for Vertical Double Gate PMOS Device. Journal of Telecommunication, Electronic and Computer Engineering (JTEC), 8(5), 23–28. Retrieved from https://jtec.utem.edu.my/jtec/article/view/719